JPH0521276Y2 - - Google Patents
Info
- Publication number
- JPH0521276Y2 JPH0521276Y2 JP9283288U JP9283288U JPH0521276Y2 JP H0521276 Y2 JPH0521276 Y2 JP H0521276Y2 JP 9283288 U JP9283288 U JP 9283288U JP 9283288 U JP9283288 U JP 9283288U JP H0521276 Y2 JPH0521276 Y2 JP H0521276Y2
- Authority
- JP
- Japan
- Prior art keywords
- terminal
- heater
- wire
- notch
- welded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 11
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 238000003780 insertion Methods 0.000 description 17
- 230000037431 insertion Effects 0.000 description 17
- 238000007654 immersion Methods 0.000 description 12
- 238000005452 bending Methods 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000003466 welding Methods 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9283288U JPH0521276Y2 (en]) | 1988-07-13 | 1988-07-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9283288U JPH0521276Y2 (en]) | 1988-07-13 | 1988-07-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0214795U JPH0214795U (en]) | 1990-01-30 |
| JPH0521276Y2 true JPH0521276Y2 (en]) | 1993-05-31 |
Family
ID=31317280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9283288U Expired - Lifetime JPH0521276Y2 (en]) | 1988-07-13 | 1988-07-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521276Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100811389B1 (ko) * | 2006-03-24 | 2008-03-07 | 가부시키가이샤 뉴플레어 테크놀로지 | 반도체 제조 장치와 히터 |
| JP7433200B2 (ja) * | 2020-12-01 | 2024-02-19 | 京セラ株式会社 | ヒータ |
-
1988
- 1988-07-13 JP JP9283288U patent/JPH0521276Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0214795U (en]) | 1990-01-30 |
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